Title:
AIR BEARING DEVICE AND MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/125756
Kind Code:
A1
Abstract:
The purpose of the invention is to provide an air bearing device that has improved floating precision and thus achieves floating precision that meets the demands of making products thinner and improving the precision of measurements, and a measuring device comprising the air bearing device. The present invention provides an air bearing device and a measuring device comprising the air bearing device, wherein the air bearing device comprises a pad unit that can float by way of a lifting force from the discharge of air, and the pad unit comprises a first pad unit that has a bearing face having a discharge region from which air is discharged and a suction region that applies a suctioning force.
Inventors:
TSUNODA KOUICHI (JP)
Application Number:
PCT/JP2015/054205
Publication Date:
August 27, 2015
Filing Date:
February 17, 2015
Export Citation:
Assignee:
OILES INDUSTRY CO LTD (JP)
International Classes:
F16C32/06
Foreign References:
| JPH06330944A | 1994-11-29 | |||
| JP2006266352A | 2006-10-05 | |||
| JP2008238144A | 2008-10-09 | |||
| DE1425043A1 | 1968-12-12 |
Attorney, Agent or Firm:
KIMIYA, Naoki (JP)
Naoki Kinomiya (JP)
Naoki Kinomiya (JP)
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