Title:
AIRBORNE MOLECULAR CONTAMINATION ACID REMOVAL FILTER USING FUNCTIONALIZED MATERIALS
Document Type and Number:
WIPO Patent Application WO/2018/237014
Kind Code:
A3
Abstract:
An airborne molecular contamination filter is herein disclosed. The airborne molecular contamination filter comprises a first filter medium that removes first airborne contaminants from a first air stream, and a second filter medium downstream of the first filter medium removing second airborne contaminants from a second air stream output from the first filter medium. At least one of the first filter medium and the second filter medium comprises a functionalized substantially non-carbon filter medium that removes a weak acid from at least one of the first air stream and the second air stream.
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Inventors:
BELANGER FRANK (US)
TISON STUART (US)
GAUDREAU JOHN (US)
SRIVASTAVA REENA (US)
SWEENEY JOSEPH (US)
TISON STUART (US)
GAUDREAU JOHN (US)
SRIVASTAVA REENA (US)
SWEENEY JOSEPH (US)
Application Number:
PCT/US2018/038516
Publication Date:
April 11, 2019
Filing Date:
June 20, 2018
Export Citation:
Assignee:
ENTEGRIS INC (US)
International Classes:
B01D39/16
Domestic Patent References:
| WO1996032180A1 | 1996-10-17 |
Foreign References:
| US20060042209A1 | 2006-03-02 | |||
| US4892719A | 1990-01-09 | |||
| US20020189457A1 | 2002-12-19 | |||
| US20080276804A1 | 2008-11-13 |
Attorney, Agent or Firm:
AMICI, Robert, M. (US)
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