Title:
AIRFLOW DISTRIBUTION METHOD OF SINGLE-CHAMBER VACUUM FURNACE
Document Type and Number:
WIPO Patent Application WO/2011/136032
Kind Code:
A1
Abstract:
The disclosed vacuum heat-treatment furnace (1), which is provided with an airflow-direction adjustment plate (50) that is provided at a predetermined angle in a manner so as to lead coolant gas circulating within the furnace into an insulated vessel (10) in which an object (W) to be processed is disposed, has a displacement driving device (60) that drives the displacement of the angle of the airflow-direction adjustment plate (50) on the basis of at least one value from among the flow sped and the density of the abovementioned coolant gas.
Inventors:
KATSUMATA Kazuhiko (1-1 Toyosu 3-chome, Koto-k, Tokyo 10, 〒1358710, JP)
Application Number:
JP2011/059283
Publication Date:
November 03, 2011
Filing Date:
April 14, 2011
Export Citation:
Assignee:
IHI Corporation (1-1 Toyosu 3-chome, Koto-ku Tokyo, 10, 〒1358710, JP)
株式会社ＩＨＩ (〒10 東京都江東区豊洲三丁目１番１号 Tokyo, 〒1358710, JP)
IHI Machinery and Furnace Co., Ltd. (1 Shin-nakahara-cho, Isogo-ku Yokohama-sh, Kanagawa 01, 〒2358501, JP)
株式会社ＩＨＩ (〒10 東京都江東区豊洲三丁目１番１号 Tokyo, 〒1358710, JP)
IHI Machinery and Furnace Co., Ltd. (1 Shin-nakahara-cho, Isogo-ku Yokohama-sh, Kanagawa 01, 〒2358501, JP)
International Classes:
F27D9/00; C21D1/00; C21D1/62; F27D7/04
Attorney, Agent or Firm:
NISHI Kazuya et al. (1-9-2, Marunouchi Chiyoda-k, Tokyo 20, 〒1006620, JP)
Claims:
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