Title:
ALIGNMENT DEVICE AND EXPOSURE DEVICE PROVIDED WITH SAME
Document Type and Number:
WIPO Patent Application WO/2012/124517
Kind Code:
A1
Abstract:
[Problem] To provide an alignment means that maintains alignment accuracy with a bottom layer of a printed board with multiple layers for use in an electronic circuit, and which enables adjustment of the alignment of an electronic component mounted on the surface of the printed board. [Solution] An alignment device comprises a storage section (82) that stores design coordinate positions (MC) at which alignment marks (AM) should be formed on a substrate (PB), a measuring section (70) that measures the coordinate positions of the alignment marks transferred to the substrate, and a calculation section (84) that calculates target coordinate positions (TG) which are the coordinate positions of the alignment marks measured by the measuring section that are moved by a prescribed distance only to the design coordinate positions.
Inventors:
LEE DUK (JP)
NAKAZAWA AKIRA (JP)
NAKAZAWA AKIRA (JP)
Application Number:
PCT/JP2012/055544
Publication Date:
September 20, 2012
Filing Date:
March 05, 2012
Export Citation:
Assignee:
ORC MFG CO LTD (JP)
LEE DUK (JP)
NAKAZAWA AKIRA (JP)
LEE DUK (JP)
NAKAZAWA AKIRA (JP)
International Classes:
G03F9/00; H01L21/027; H05K3/00
Foreign References:
| JPH0536583A | 1993-02-12 | |||
| JP2010103476A | 2010-05-06 | |||
| JPH02142110A | 1990-05-31 | |||
| JPH07321012A | 1995-12-08 | |||
| JP2002539605A | 2002-11-19 |
Attorney, Agent or Firm:
ISONO, Tomihiko (JP)
Tomihiko Isono (JP)
Tomihiko Isono (JP)
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Claims: