Title:
ALIGNMENT STAGE
Document Type and Number:
WIPO Patent Application WO/2010/137320
Kind Code:
A1
Abstract:
An alignment stage comprises a base (1) and a top table (4a) which is arranged above the base and holds a work to which a moving load is applied, wherein a support unit (13) and driving units (14A, 14B, 14C, 14D) are provided between the base (1) and the top table (4a) and at portions which are arranged in a zigzag formation with respect to the load movement direction (L) to correspond to the center and four corners of the top table (4a), the support unit (13) being provided with three degrees of freedom of X, Y, and θ, and the driving unit comprising a uniaxial direction ball screw linear motion mechanism (9) in addition to the structure similar to the support unit (13). The ball screw linear motion mechanisms (9) of one diagonally arranged pair of driving units (14A, 14B) are arranged to be orthogonal with the ball screw linear motion mechanisms (9) of the other diagonally arranged pair of driving units (14C, 14D). The moving load applied to the top table (4a) through the work while moving in the load movement direction (L) is successively received by the respective driving units (14A, 14C), the support unit (13), and the respective driving units (14B, 14D), so as to prevent deformation of the top table (4a).
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Inventors:
SAITO HIROSHI (JP)
Application Number:
PCT/JP2010/003545
Publication Date:
December 02, 2010
Filing Date:
May 26, 2010
Export Citation:
Assignee:
IHI CORP (JP)
SAITO HIROSHI (JP)
SAITO HIROSHI (JP)
International Classes:
B41F33/14; B23Q1/48; B41F15/16; B41F17/14; B65G49/06; G02F1/13; G05D3/00; H01L21/68
Domestic Patent References:
| WO2006059457A1 | 2006-06-08 |
Foreign References:
| JPH11300558A | 1999-11-02 | |||
| JP2008021098A | 2008-01-31 | |||
| JP2700050B2 | 1998-01-19 |
Attorney, Agent or Firm:
NISHI, Kazuya et al. (JP)
Kazuya Nishi (JP)
Kazuya Nishi (JP)
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