Title:
ALIGNMENT SYSTEM AND METHOD OF USING THE SAME
Document Type and Number:
WIPO Patent Application WO/2017/196638
Kind Code:
A3
Abstract:
An alignment system includes a substrate fixture configured to receive a substrate, a guide structure positionally fixed relative to a substrate fixture and at least one actuated clamp. The substrate fixture may be configured to receive a substrate. An actuated clamp may include a clamp, an actuator coupled to the clamp and positionally fixed relative to a substrate fixture that is configured to receive a substrate, and an encoder operative to generate and output encoder data indicative of the position of the clamp. The actuator may be operative to move the clamp relative to the substrate fixture. The guide structure and the actuated clamp can be arranged such that a substrate received by the substrate fixture is pressable between the clamp and the guide structure when the clamp is moved relative to the substrate fixture by the first actuator.
Inventors:
JOHNS TED (US)
KOSMOWSKI MARK (US)
PRODANI RIDIAN (US)
JOHANSEN BRIAN (US)
KOSMOWSKI MARK (US)
PRODANI RIDIAN (US)
JOHANSEN BRIAN (US)
Application Number:
PCT/US2017/031146
Publication Date:
July 26, 2018
Filing Date:
May 04, 2017
Export Citation:
Assignee:
ELECTRO SCIENT IND INC (US)
International Classes:
H01J37/32
Domestic Patent References:
| WO2015158390A1 | 2015-10-22 | |||
| WO2015085248A1 | 2015-06-11 |
Foreign References:
| US20080202421A1 | 2008-08-28 | |||
| US20160053361A1 | 2016-02-25 | |||
| EP0511704A1 | 1992-11-04 |
Attorney, Agent or Firm:
EATON, Kurt, M. (US)
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