Title:
ALIGNMENT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2015/193985
Kind Code:
A1
Abstract:
In alignment systems, there are cases where, for instance, alignment system-side failures, such as abnormal deformations of an apparatus, are superimposed. Furthermore, there are cases where a camera itself for alignment has failed. In conventional technologies, such alignment system-side obstructive factors and discrimination of a plurality of obstructive factors have not been considered. The present invention has an alignment unit that performs alignment with respect to a predetermined sample, an image pickup unit for obtaining an image of the sample, and a processing unit. The image pickup unit moves by means of the alignment unit, and obtains a first image and a second image having been obtained after the first image. The processing unit obtains a first positional shift trend on the basis of the first image and the second image, and determines whether there is an alignment abnormality or not on the basis of a change of the first positional shift trend.
Inventors:
ODAI MASAKI (JP)
INOUE TOMOHIRO (JP)
TAKAHIRA ISAO (JP)
IKEDA HIROSHI (JP)
INOUE TOMOHIRO (JP)
TAKAHIRA ISAO (JP)
IKEDA HIROSHI (JP)
Application Number:
PCT/JP2014/066093
Publication Date:
December 23, 2015
Filing Date:
June 18, 2014
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
H05K13/08; G05B23/02
Foreign References:
| JP2004301620A | 2004-10-28 | |||
| JP2014057032A | 2014-03-27 | |||
| JP2006324424A | 2006-11-30 |
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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