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Title:
AMMONIUM FLUOROALKANESULFONATES AND A SYNTHESIS METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2010/104178
Kind Code:
A1
Abstract:
An ammonium hydroxyfluoroalkanesulfinate is obtained by using an organic base while sulfinating a bromofluoroalcohol with a sulfinating agent. An ammonium hydroxyfluoroalkanesulfonate is obtained by oxidizing said ammonium hydroxyfluoroalkanesulfinate. An onium fluoroalkanesulfonate is obtained by converting said ammonium hydroxyfluoroalkanesulfonate into an onium salt through esterification. This onium fluoroalkanesulfonate is useful as a photoacid generator used in chemically amplified resists, etc.

Inventors:
NAGAMORI, Masashi (())
永盛 将士 (())
HAGIWARA, Yuji (())
萩原 勇士 (())
Application Number:
JP2010/054246
Publication Date:
September 16, 2010
Filing Date:
March 12, 2010
Export Citation:
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Assignee:
CENTRAL GLASS COMPANY, LIMITED (5253, Oaza Okiube Ube-sh, Yamaguchi 01, 〒7550001, JP)
セントラル硝子株式会社 (〒01 山口県宇部市大字沖宇部5253番地 Yamaguchi, 〒7550001, JP)
NAGAMORI, Masashi (())
永盛 将士 (())
HAGIWARA, Yuji (())
International Classes:
C07C313/04; C07C303/02; C07C303/32; C07C309/08; C07C309/12; C07C381/12; G03F7/004
Domestic Patent References:
WO2008056795A1
WO2006121096A1
Attorney, Agent or Firm:
HASHIMOTO, Takeshi et al. (Ekisaikai Bldg. 1-29, Akashi-cho, Chuo-k, Tokyo 44, 〒1040044, JP)
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