Title:
AMMONIUM FLUOROALKANESULFONATES AND A SYNTHESIS METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2010/104178
Kind Code:
A1
Abstract:
An ammonium hydroxyfluoroalkanesulfinate is obtained by using an organic base while sulfinating a bromofluoroalcohol with a sulfinating agent. An ammonium hydroxyfluoroalkanesulfonate is obtained by oxidizing said ammonium hydroxyfluoroalkanesulfinate. An onium fluoroalkanesulfonate is obtained by converting said ammonium hydroxyfluoroalkanesulfonate into an onium salt through esterification. This onium fluoroalkanesulfonate is useful as a photoacid generator used in chemically amplified resists, etc.
Inventors:
NAGAMORI MASASHI
HAGIWARA YUJI
MASUBUCHI TAKASHI
NARIZUKA SATORU
HAGIWARA YUJI
MASUBUCHI TAKASHI
NARIZUKA SATORU
Application Number:
PCT/JP2010/054246
Publication Date:
September 16, 2010
Filing Date:
March 12, 2010
Export Citation:
Assignee:
CENTRAL GLASS CO LTD (JP)
NAGAMORI MASASHI
HAGIWARA YUJI
MASUBUCHI TAKASHI
NARIZUKA SATORU
NAGAMORI MASASHI
HAGIWARA YUJI
MASUBUCHI TAKASHI
NARIZUKA SATORU
International Classes:
C07C313/04; C07C303/02; C07C303/32; C07C309/08; C07C309/12; C07C381/12; G03F7/004
Domestic Patent References:
| WO2008056795A1 | 2008-05-15 | |||
| WO2006121096A1 | 2006-11-16 |
Attorney, Agent or Firm:
HASHIMOTO, Takeshi et al. (JP)
Hashimoto 剛 (JP)
Hashimoto 剛 (JP)
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