AMORPHOUS CARBON FILM, METHOD FOR FORMING AMORPHOUS CARBON FILM, ELECTROCONDUCTIVE MEMBER COMPRISING AMORPHOUS CARBON FILM, AND SEPARATOR FOR FUEL BATTERY

Title:

AMORPHOUS CARBON FILM, METHOD FOR FORMING AMORPHOUS CARBON FILM, ELECTROCONDUCTIVE MEMBER COMPRISING AMORPHOUS CARBON FILM, AND SEPARATOR FOR FUEL BATTERY

Document Type and Number:

WIPO Patent Application WO/2007/136131

Kind Code:

A1

Abstract:

This invention provides an amorphous carbon film comprising carbon and hydrogen. In the amorphous carbon film, the content of hydrogen is not more than 30 at% (excluding 0 at%). When the total content of carbon is presumed to be 100 at%, the content of carbon having an sp2 hybridized orbital is not less than 70 at% and less than 100 at%. Electroconductive properties are imparted to the amorphous carbon film by increasing a structure of Csp2 by regulating the content of hydrogen, Csp3 and the like. The amorphous carbon film may be formed by a plasma CVD method using at least one reactive gas selected from carbocyclic compound gases containing carbon having an sp2 hybridized orbital, and heterocyclic compound gases containing carbon having an sp2 hybridized orbital and, at the same time, silicon and/or nitrogen. The electroconductive member is produced by forming an amorphous carbon film on the surface of a base material.

Inventors:

ISEKI, Takashi (41-1Aza Yokomichi, Oaza Nagakute, Nagakute-cho, Aichi-gu, Aichi 92, 4801192, JP)
伊関崇 (〒92 愛知県愛知郡長久手町大字長湫字横道４１番地の１株式会社豊田中央研究所内 Aichi, 4801192, JP)
YAMADA, Yuka (41-1Aza Yokomichi, Oaza Nagakute, Nagakute-cho, Aichi-gu, Aichi 92, 4801192, JP)
山田由香 (〒92 愛知県愛知郡長久手町大字長湫字横道４１番地の１株式会社豊田中央研究所内 Aichi, 4801192, JP)
NAKANISHI, Kazuyuki (41-1Aza Yokomichi, Oaza Nagakute, Nagakute-cho, Aichi-gu, Aichi 92, 4801192, JP)
中西和之 (〒92 愛知県愛知郡長久手町大字長湫字横道４１番地の１株式会社豊田中央研究所内 Aichi, 4801192, JP)
OSHIMA, Tadashi (41-1Aza Yokomichi, Oaza Nagakute, Nagakute-cho, Aichi-gu, Aichi 92, 4801192, JP)
大島正 (〒92 愛知県愛知郡長久手町大字長湫字横道４１番地の１株式会社豊田中央研究所内 Aichi, 4801192, JP)

Application Number:

JP2007/060765

Publication Date:

November 29, 2007

Filing Date:

May 22, 2007

Export Citation:

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Assignee:

KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO (41-1, Aza Yokomichi Oaza Nagakute, Nagakute-cho,Aichi-gu, Aichi 92, 4801192, JP)
株式会社豊田中央研究所 (〒92 愛知県愛知郡長久手町大字長湫字横道４１番地の１ Aichi, 4801192, JP)
ISEKI, Takashi (41-1Aza Yokomichi, Oaza Nagakute, Nagakute-cho, Aichi-gu, Aichi 92, 4801192, JP)
伊関崇 (〒92 愛知県愛知郡長久手町大字長湫字横道４１番地の１株式会社豊田中央研究所内 Aichi, 4801192, JP)
YAMADA, Yuka (41-1Aza Yokomichi, Oaza Nagakute, Nagakute-cho, Aichi-gu, Aichi 92, 4801192, JP)
山田由香 (〒92 愛知県愛知郡長久手町大字長湫字横道４１番地の１株式会社豊田中央研究所内 Aichi, 4801192, JP)
NAKANISHI, Kazuyuki (41-1Aza Yokomichi, Oaza Nagakute, Nagakute-cho, Aichi-gu, Aichi 92, 4801192, JP)
中西和之 (〒92 愛知県愛知郡長久手町大字長湫字横道４１番地の１株式会社豊田中央研究所内 Aichi, 4801192, JP)
OSHIMA, Tadashi (41-1Aza Yokomichi, Oaza Nagakute, Nagakute-cho, Aichi-gu, Aichi 92, 4801192, JP)

International Classes:

C01B31/02; C23C16/26; C23C16/50; H01B1/04; H01B5/14; H01B13/00; H01M8/02

Attorney, Agent or Firm:

OHKAWA, Hiroshi (2-5 Meieki 3-chome, Nakamura-ku Nagoya-sh, Aichi 02, 4500002, JP)

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