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Patent Searching and Data


Title:
AMPLITUDE MEASURING DEVICE AND VIBRATION MEASURING METHOD IN AMPLITUDE MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/134932
Kind Code:
A1
Abstract:
Provided are an amplitude measuring device capable of detecting an amplitude of minute vibration, and a vibration measuring method in the amplitude measuring device. The amplitude measuring device includes: an irradiation unit that irradiates a vibrating member that is vibrated at a predetermined period by a vibrating element with light to generate a vibration waveform; a detection unit that detects reflected light, which is reflected by the vibrating member vibrated by the vibrating element; a change amount calculation unit that calculates the change amount of inclination of the vibration waveform on the basis of the displacement of the reflected light detected by the detection unit and the distance from the position, where the vibration member is irradiated with the light, to the detection unit; and an amplitude calculation unit that calculates the amplitude of the vibration waveform on the basis of the maximum value of the change amount of the inclination calculated by the change amount calculation unit.

Inventors:
YOUOKU SACHIHIRO (JP)
MIYAMOTO AKINORI (JP)
ENDO YASUHIRO (JP)
Application Number:
PCT/JP2017/001656
Publication Date:
July 26, 2018
Filing Date:
January 19, 2017
Export Citation:
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Assignee:
FUJITSU LTD (JP)
International Classes:
G01H9/00
Foreign References:
JP2001108519A2001-04-20
JPS5926019A1984-02-10
JP2001311658A2001-11-09
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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