ANALYSIS DEVICE AND ANALYSIS METHOD

Title:

ANALYSIS DEVICE AND ANALYSIS METHOD

Document Type and Number:

WIPO Patent Application WO/2017/056526

Kind Code:

A1

Abstract:

An analysis device (1) is provided with: a turntable (10) on which a substrate (60) is held; an optical pickup (20), which is driven in the direction orthogonal to a rotation axis (C10) of the turntable (10), irradiates reaction regions (65) with a laser beam (20a), and receives reflection light of the laser beam; an optical pickup drive circuit (8); and a control unit (9). The reaction regions (65) are formed at different positions from a center (Ca) of the substrate (60). The center (Ca) of the substrate 60 is positioned on the rotation axis (C10) of the turntable (10). The optical pickup (20) detects the light reception level of the reflection light, and generates a light reception level signal (KS). The control unit (9) controls a turntable drive circuit (4) to rotate the substrate (60), controls the optical pickup drive circuit (8) to drive the optical pickup (20), and identifies the reaction regions (65) on the basis of positional information signal (PS) and the light reception level signal (KS).

Inventors:

IWAMA SHIGEHIKO (JP)
ITONAGA MAKOTO (JP)
HASEGAWA YUICHI (JP)
TSUJITA KOJI (JP)
ONO MASAYUKI (JP)
IGARASHI MAKOTO (JP)

Application Number:

PCT/JP2016/058707

Publication Date:

April 06, 2017

Filing Date:

March 18, 2016

Export Citation:

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Assignee:

JVC KENWOOD CORP (JP)

International Classes:

G01N33/543; G01N35/04; G01N37/00

Foreign References:

JP2009063310A	2009-03-26
JP2015127692A	2015-07-09
JP2012058019A	2012-03-22
US20050037484A1	2005-02-17

Other References: