Title:
ANALYSIS DISPLAY METHOD OF DEFECTIVE FACTORS AND ANALYSIS DISPLAY DEVICE OF DEFECTIVE FACTORS
Document Type and Number:
WIPO Patent Application WO/2011/065428
Kind Code:
A1
Abstract:
A calculation device (16) analyzes defective factors of a defective occurrence on the basis of representative values for manufacturing data and assay data of products gathered for each product. A display device (17), using calculations by way of statistical techniques, selects, from among a plurality of representative values that were analyzed, manufacturing data and assay data on which the representative values were based for data items extracted from analysis results, and displays the same.
Inventors:
SHIMIZU KAZUTOSHI
Application Number:
PCT/JP2010/071029
Publication Date:
June 03, 2011
Filing Date:
November 25, 2010
Export Citation:
Assignee:
SHARP KK (JP)
SHIMIZU KAZUTOSHI
SHIMIZU KAZUTOSHI
International Classes:
G05B19/418; G05B23/02; G06Q10/00; G06Q50/00; H01L21/02
Foreign References:
| JP2005284664A | 2005-10-13 | |||
| JP2006351667A | 2006-12-28 | |||
| JP2009009299A | 2009-01-15 | |||
| JP2009021348A | 2009-01-29 | |||
| JP2004326339A | 2004-11-18 | |||
| JP2005251925A | 2005-09-15 |
Attorney, Agent or Firm:
TANAKA, Mitsuo et al. (JP)
Mitsuo Tanaka (JP)
Mitsuo Tanaka (JP)
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