ANALYSIS LIQUID RECOVERY METHOD

WIPO Patent Application WO/2023/037564

A1

The objective of the present invention is to provide an analysis liquid recovery method with which it is possible to collect an analysis liquid with a high recovery rate, even in the case of a highly hydrophilic substrate. The present invention provides an analysis liquid recovery method for employing a nozzle main body to recover an analysis liquid that has swept a substrate surface, using a substrate analysis nozzle which comprises the nozzle main body, capable of discharging and sucking the analysis liquid, and an outer tube disposed at an outer periphery of the nozzle main body so as to enclose the analysis liquid that is held at a tip end of the nozzle main body and that sweeps the substrate, the substrate analysis nozzle being provided with a suction means for creating a reduced-pressure atmosphere between the nozzle main body and the outer tube, and the analysis liquid recovery method being characterized in that, when the substrate surface is being swept by the analysis liquid, the nozzle main body and the outer tube are disposed such that height positions of tip ends thereof are the same, and after the sweeping is complete, the analysis liquid is recovered by means of the nozzle main body in a state in which the tip end of the outer tube is separated from the substrate surface.

WO/2022/194543	DEVICE AND METHOD FOR DEPOSITING LIQUID ON A CARRIER
JP3388825	DISPENSING DEVICE
JP5327325	Needle moving device

KAWABATA KATSUHIKO (JP)
LEE SUNGJAE (JP)

PCT/JP2021/037835

March 16, 2023

October 13, 2021

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IAS INC (JP)

G01N35/10; G01N1/00; G01N1/28

JPH05256749A	1993-10-05
JP2006190858A	2006-07-20
JP2004170222A	2004-06-17
JP2013257272A	2013-12-26

TANAKA AND OKAZAKI (JP)

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