Title:
ANEMOMETER HAVING FUNCTION OF AUTOMATICALLY MAINTAINING WIND SPEED
Document Type and Number:
WIPO Patent Application WO/2021/075727
Kind Code:
A1
Abstract:
The present invention relates to an anemometer having a function of automatically maintaining wind speed, the anemometer comprising: a main body which calculates the wind speed inside a gas supply device for manufacturing a semiconductor device on the basis of the total pressure and static pressure inside the gas supply device as output from a pitot tube installed in an upper central portion inside the gas supply device; and an external damper driving member which is connected to the main body and automatically maintains the wind speed within a normal range by driving a damper when the wind speed calculated in the main body is abnormal, the damper being connected to an exhaust duct for discharging an exhaust gas of the gas supply device to the outside.
Inventors:
KIM JEONG NAM (KR)
YANG DONG YEOB (KR)
KIM SUNG KON (KR)
YANG DONG YEOB (KR)
KIM SUNG KON (KR)
Application Number:
PCT/KR2020/012163
Publication Date:
April 22, 2021
Filing Date:
September 09, 2020
Export Citation:
Assignee:
SSOLLOCK CO LTD (KR)
KIM JEONG NAM (KR)
KIM JEONG NAM (KR)
International Classes:
G01P5/17; G01D7/02; G01D11/16; G08B21/18; H01L21/67
Foreign References:
| KR101821759B1 | 2018-03-08 | |||
| JP2007207762A | 2007-08-16 | |||
| US20060260698A1 | 2006-11-23 | |||
| KR20170077177A | 2017-07-05 | |||
| KR20150069526A | 2015-06-23 |
Attorney, Agent or Firm:
JUNG, Bu Yon (KR)
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