ANGLE MEASUREMENT AND CALIBRATION DEVICE AND SYSTEM FOR LASER INTERFEROMETER

WIPO Patent Application WO/2018/040531

A1

Provided is an angle measurement and calibration device and system of a laser interferometer. The angle measurement and calibration device of the laser interferometer comprises a laser head (1), an angular interferoscope (2), an angular reflector (3), an upper turntable tray (4), a lower turntable tray (5), and a turntable base (6). The angular interferoscope (2) is arranged between the laser head (1) and the angular reflector (3). The angular reflector (3) is arranged on the upper turntable tray (4). The upper turntable tray (4) is arranged above the lower turntable tray (5). The turntable base (6) is provided with a recess, and the lower turntable tray (5) is arranged on the turntable base (6) via the recess. The device has a precise structure and a small standard angle error, and can calibrate an initial zero angle by actively generating an angle of declination. The angle of declination can be actively generated by an angle grating (11) and a driving member (10), and the generated angle is relatively precise. Accordingly, an initial zero error and a constant of the angular reflector (3) can also be calibrated during the calibrating process, which simplifies the calibration procedure of the laser interferometer and improves the calibration efficiency.

ZHANG HEJUN (CN)
PAN ZIXIANG (CN)
LIU LONGWEI (CN)

PCT/CN2017/075819

March 08, 2018

March 07, 2017

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CHOTEST TECH INC (CN)

G01B9/02

CN205879111U	2017-01-11
CN101236076A	2008-08-06
CN103499365A	2014-01-08
CN105241539A	2016-01-13
CN104634280A	2015-05-20
CN203572451U	2014-04-30
JP2000111325A	2000-04-18

SZ KINDWALF INTELLECTUAL PROPERTY FIRM (CN)

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