Title:
ANGULAR ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2014/077299
Kind Code:
A1
Abstract:
An angular acceleration sensor (10) having a planar surface and comprising a fixing section (12), a weight section (13), and a beam section (14). The weight section (13) has a recessed section (13A) that is recessed in the X-axis negative direction in the planar surface. The fixing section (12) has a protruding section (12A) that protrudes in the X-axis negative direction in the planar surface and faces the recessed section (13A), and a slit (18A) that penetrates in the X-axis positive direction from a position adjacent to the protruding section (12A). The beam section (14) extends along the Y axis in the planar surface, is connected between the recessed section (13A) and the protruding section (12A), and supports the weight section (13) so as to be displaceable relative to the fixing section (12).
More Like This:
| JP2010044092 | SENSOR DEVICE |
| JPH0416769 | SEMICONDUCTOR ACCELERATION SENSOR |
| JP2008026183 | IC-INTEGRATED ACCELERATION SENSOR |
Inventors:
ICHIMARU MASAYUKI (JP)
Application Number:
PCT/JP2013/080742
Publication Date:
May 22, 2014
Filing Date:
November 14, 2013
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01P15/12; H01L29/84
Domestic Patent References:
| WO2011161958A1 | 2011-12-29 |
Foreign References:
| JP2001203371A | 2001-07-27 |
Attorney, Agent or Firm:
Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)
Download PDF: