Title:
ANGULAR ACCELERATION SENSOR AND ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2014/092040
Kind Code:
A1
Abstract:
Provided are an angular acceleration sensor and an acceleration sensor that enable both a wide detection area and a high signal-to-noise (S/N) ratio to be established. The angular acceleration sensor (10) has a flat plate surface that follows the X-Y plane, and is provided with a stationary part (12), a weight part (13), a beam part (14), and piezoresistive elements (15A to 15D). The weight part (13) provides support to the stationary part (12). The beam part (14) stretches along the Y-axis, and is connected to the stationary part (12) and the weight part (13). The beam part (14) is provided with through holes (27A to 27D), which penetrate in the Z-axis direction, and width direction protrusions (28A, 28B) that protrude in the X-axis direction. The positions of the piezoresistive elements (15A to 15D) in the Y-axis direction overlap with the through holes (27A to 27D), and are offset from the width direction protrusions (28A, 28B).
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Inventors:
KITAI MASAHIRO (JP)
ICHIMARU MASAYUKI (JP)
ICHIMARU MASAYUKI (JP)
Application Number:
PCT/JP2013/082931
Publication Date:
June 19, 2014
Filing Date:
December 09, 2013
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01P15/12; H01L29/84
Domestic Patent References:
| WO2012153439A1 | 2012-11-15 |
Foreign References:
| JP2005283402A | 2005-10-13 | |||
| JP2007309654A | 2007-11-29 | |||
| JP2010256234A | 2010-11-11 |
Attorney, Agent or Firm:
Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)
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