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Patent Searching and Data


Title:
ANGULAR VELOCITY SENSOR, SENSOR ELEMENT, AND MULTI-AXIS ANGULAR VELOCITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2018/021167
Kind Code:
A1
Abstract:
An angular velocity sensor has a piezoelectric body, a drive circuit, and a detection circuit. The piezoelectric body has a pair of frames, a pair of drive arms, and a pair of detection arms. The pair of frames are mutually facing in the y axis direction of a Cartesian coordinate system xyz. The pair of drive arms each bridge the pair of frames and are mutually facing in the x axis direction. The pair of detection arms extend in the y axis direction from the pair of frames at positions between the pair of drive arms in the x axis direction. The drive circuit applies voltages of mutually inverse phases to the pair of drive arms, such that the pair of drive arms bend to mutually opposite sides in the x axis direction and vibrate. The detection circuit detects signals generated as a result of bending deformation in the z axis direction of the pair of detection arms.

Inventors:
SOEJIMA MUNETAKA (JP)
Application Number:
PCT/JP2017/026392
Publication Date:
February 01, 2018
Filing Date:
July 21, 2017
Export Citation:
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Assignee:
KYOCERA CORP (JP)
International Classes:
G01C19/574; H01L41/047; H01L41/113
Foreign References:
US20130277775A12013-10-24
JP2016133427A2016-07-25
JP2016085134A2016-05-19
JP2016095176A2016-05-26
Attorney, Agent or Firm:
IIJIMA, YASUHIRO (JP)
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