Title:
ANGULAR VELOCITY SENSOR ELEMENT
Document Type and Number:
WIPO Patent Application WO/2016/035277
Kind Code:
A1
Abstract:
An angular velocity sensor element according to the present disclosure has: a fixed part; a first detector that is connected to the fixed part, is provided with a first detection electrode, and extends in a first direction; a second detector that has one end connected to the first detector, extends in a second direction roughly perpendicular to the first direction, and is provided with a second detection electrode; and a driver that is connected to the other end of the second detector, is provided on the same plane as the first detector and second detector, and is provided with a drive electrode. The driver has a folded-back shape having at least two bent parts, and when viewed from above, the direction from the part where the second detector and driver are connected to the leading end of the driver is between the first direction and second direction.
Inventors:
KOBAYASHI YASUNOBU
Application Number:
PCT/JP2015/004247
Publication Date:
March 10, 2016
Filing Date:
August 25, 2015
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
G01C19/5607; H01L41/113
Domestic Patent References:
| WO2007086337A1 | 2007-08-02 | |||
| WO2011161958A1 | 2011-12-29 | |||
| WO2013061558A1 | 2013-05-02 |
Foreign References:
| JP2007232710A | 2007-09-13 |
Attorney, Agent or Firm:
FUJII, Kentaro et al. (JP)
Fujii Kentaro (JP)
Fujii Kentaro (JP)
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