Title:
ANGULAR VELOCITY SENSOR AND SENSOR ELEMENT
Document Type and Number:
WIPO Patent Application WO/2019/044696
Kind Code:
A1
Abstract:
According to the present invention, a pair of mounting arms in an angular velocity sensor are space apart from each other in the x-axis direction of an xyz-orthogonal coordinate system. A frame comprises: a main part which extends along the x-axis; and a pair of extension parts which connect both ends of the main part and inner-sides of the pair of the mounting arms, at least a portion of the extension parts extending in a direction crossing the x-axis when viewed in the z-axis direction. A pair of driving arms extend in the y-axis direction in parallel with each other from positions spaced apart from each other along the x-axis direction on the main part. A detection arm extends in the y-axis direction from a position which on the main part is between the pair of driving arms in the x-axis direction. A driving circuit applies voltages of opposite phases to the pair of driving arms so that the pair of driving arms bend and vibrate in opposite directions in the x-axis direction. A detection circuit detects a signal which is generated due to bending deformation of the detection arm in the z-axis direction.
Inventors:
SOEJIMA MUNETAKA (JP)
Application Number:
PCT/JP2018/031349
Publication Date:
March 07, 2019
Filing Date:
August 24, 2018
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
G01C19/5621; H01L41/09
Foreign References:
| JP2009156832A | 2009-07-16 | |||
| JP2013167459A | 2013-08-29 | |||
| JP2016090254A | 2016-05-23 | |||
| JP2015087334A | 2015-05-07 | |||
| JP2010171966A | 2010-08-05 |
Attorney, Agent or Firm:
IIJIMA, YASUHIRO (JP)
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