ANGULAR VELOCITY SENSOR AND PROCESS FOR PRODUCING THE SAME

Title:

ANGULAR VELOCITY SENSOR AND PROCESS FOR PRODUCING THE SAME

Document Type and Number:

WIPO Patent Application WO/2007/055133

Kind Code:

A1

Abstract:

An angular velocity sensor of stable performance such that even when carbon dioxide gas is produced by reaction of oxygen gas in a package accommodating an oscillator, is less in the fluctuation of drive efficiency of the oscillator. There is provided an angular velocity sensor comprising a package and, placed inside the same, a mixed gas consisting of an inert gas and oxygen gas wherein the pressure of mixed gas inside the package is rendered higher than the atmospheric pressure.

Inventors:

HAYASHI MICHIHIKO
HATANAKA MASAKAZU

Application Number:

PCT/JP2006/321852

Publication Date:

May 18, 2007

Filing Date:

November 01, 2006

Export Citation:

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Assignee:

MATSUSHITA ELECTRIC IND CO LTD (JP)
HAYASHI MICHIHIKO
HATANAKA MASAKAZU

International Classes:

G01C19/56; G01C19/5607; H01L41/08; H01L41/187; H03H3/02; H03H9/10

Domestic Patent References:

WO2003046479A1

2003-06-05

Foreign References:

JPS62183147A	1987-08-11
JPH04276912A	1992-10-02
JP2004153645A	2004-05-27
JP2005249645A	2005-09-15