Title:
ANGULAR VELOCITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2012/090452
Kind Code:
A1
Abstract:
Provided is an angular velocity sensor comprising a detection element which has a shape defined in XYZ space and is capable of detecting angular velocity about the Z axis. The detection element has a support extending in the direction of the X axis, an arm connected to the support, and a plumb connected to the arm. The arm has a first end connected to the support and a second end connected to the arm. The arm substantially has a J shape comprising a first arm section extending from the first end to a first corner in the direction of the Y axis, a second arm section extending from the first corner to a second corner in the direction of the X axis, and a third arm section extending from the second corner to the second end in the direction of the Y axis. The length of the arm in the direction of the X axis is greater than the length of the plumb in the direction of the X axis. The sensitivity of the angular velocity sensor with respect to angular velocity about the Z axis can be improved.
Inventors:
FUJII, Tsuyoshi (())
藤井 剛 (())
藤井 剛 (())
Application Number:
JP2011/007190
Publication Date:
July 05, 2012
Filing Date:
December 22, 2011
Export Citation:
Assignee:
PANASONIC CORPORATION (1006, Oaza Kadoma Kadoma-sh, Osaka 01, 〒5718501, JP)
パナソニック株式会社 (〒01 大阪府門真市大字門真１００６番地 Osaka, 〒5718501, JP)
FUJII, Tsuyoshi (())
パナソニック株式会社 (〒01 大阪府門真市大字門真１００６番地 Osaka, 〒5718501, JP)
FUJII, Tsuyoshi (())
International Classes:
G01C19/5607; H01L41/08; H01L41/09; H01L41/187
Attorney, Agent or Firm:
NAITO, Hiroki et al. (1006 Oaza Kadoma, Kadoma-sh, Osaka 01, 〒5718501, JP)
Claims: