Title:
ANIONIC PHOTOINITIATION
Document Type and Number:
WIPO Patent Application WO/1993/010483
Kind Code:
A1
Abstract:
A method for the anionic photoinitiation of a substrate that includes exposing the substrate to an inorganic complex that releases an anionically charged nucleophile on irradiation.
Inventors:
KUTAL CHARLES R (US)
Application Number:
PCT/US1992/009942
Publication Date:
May 27, 1993
Filing Date:
November 12, 1992
Export Citation:
Assignee:
UNIV GEORGIA RES FOUND (US)
International Classes:
C08F2/48; C08F2/50; C08F10/00; G03C1/66; G03C1/67; G03C1/735; G03F7/029; (IPC1-7): G03C1/66; G03C1/67; G03C1/72; G03C1/725
Foreign References:
| US3794497A | 1974-02-26 |
Other References:
POLYMER PHOTOCHEMISTRY, Volume 5, 1984, ASLAM et al., "Photopolymerization of Vinyl Monomer Initiated by Diacidobis (Ethylenediamine) Cobalt (III) Complexes", pages 41-48.
JOURNAL OF COATING TECHNOLOGY, Volume 62, Number 786, July 1990, KUTAL et al., "New Inorganic Photoinitiators for Deep-UV Resist Material", pages 63-67.
SPIE-THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, Volume 1466, March 1991, KUTAL et al., "Novel Base-Generating Photoinitiators for Deep-UV Lithography", pages 362-367.
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, Volume 134, Number 9, September 1987, KUTAL et al., "Photoinitiated Cross-Linking and Image Formation in Thin Polymer Films Containing a Transition Metal Compound", pages 2280-2285.
JOURNAL OF COATING TECHNOLOGY, Volume 62, Number 786, July 1990, KUTAL et al., "New Inorganic Photoinitiators for Deep-UV Resist Material", pages 63-67.
SPIE-THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, Volume 1466, March 1991, KUTAL et al., "Novel Base-Generating Photoinitiators for Deep-UV Lithography", pages 362-367.
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, Volume 134, Number 9, September 1987, KUTAL et al., "Photoinitiated Cross-Linking and Image Formation in Thin Polymer Films Containing a Transition Metal Compound", pages 2280-2285.
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