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Title:
ANNEALING PLATE, MANUFACTURING METHOD OF ANNEALING PLATE, AND MANUFACTURING METHOD OF SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2019/189567
Kind Code:
A1
Abstract:
This annealing plate, used in annealing processing of a plate-shape blank, is one of multiple plates stacked so as to sandwich the blank from both sides, and is characterized by having a pair of primary surfaces, with at least one of the primary surfaces contacting the blank, and by having one or multiple through-holes that open in the primary surfaces and pass through the plate.

Inventors:
HASHIMOTO KAZUAKI (JP)
MIURA MASAFUMI (JP)
Application Number:
PCT/JP2019/013583
Publication Date:
October 03, 2019
Filing Date:
March 28, 2019
Export Citation:
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Assignee:
HOYA CORP (JP)
International Classes:
G11B5/84; C03B25/02
Domestic Patent References:
WO2014103295A12014-07-03
Foreign References:
JP2013538175A2013-10-10
JP2008226377A2008-09-25
JP2006021947A2006-01-26
JP2015067502A2015-04-13
JPH0920527A1997-01-21
Attorney, Agent or Firm:
GLOBAL IP TOKYO (JP)
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