Title:
ANODE HOLDER AND PLATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/119182
Kind Code:
A1
Abstract:
Provided are: an anode holder for preventing the spread of a flux film and an additive between an exterior space and an interior space in which an anode is positioned; and a plating device provided with the same. This anode holder (60) has: an interior space (61) for storing an anode; a diaphragm configured so as to cover the front surface of the interior space (61); a hole (71) connecting to the interior space (61), and formed in the outer surface of the anode holder; and a valve (91) for sealing the hole (71).
Inventors:
YAHAGI MITSUTOSHI (JP)
KIMURA MASAAKI (JP)
TSUJINO JUNICHIRO (JP)
KIMURA MASAAKI (JP)
TSUJINO JUNICHIRO (JP)
Application Number:
PCT/JP2015/053178
Publication Date:
August 13, 2015
Filing Date:
February 05, 2015
Export Citation:
Assignee:
EBARA CORP (JP)
International Classes:
C25D17/12; C25D17/00
Domestic Patent References:
| WO2001068952A1 | 2001-09-20 |
Foreign References:
| JP2000087299A | 2000-03-28 | |||
| JP2007113082A | 2007-05-10 | |||
| JPS5848691A | 1983-03-22 | |||
| US20040256238A1 | 2004-12-23 | |||
| US20040089555A1 | 2004-05-13 | |||
| JPH0931700A | 1997-02-04 |
Attorney, Agent or Firm:
ONO, Shinjiro et al. (JP)
Ono Shinjiro (JP)
Ono Shinjiro (JP)
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