Title:
ANODE HOLDER AND PLATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/250696
Kind Code:
A1
Abstract:
Proposed are an anode holder and plating device such that depletion of additives on the plating device can be suppressed. The anode holder, which is for holding an anode used in a plating device, is provided with: an internal space which is formed inside the anode holder and is for accommodating the anode; a mask which has multiple holes and covers the front side of the internal space; and a diaphragm, at least a portion of the diaphragm being fixed to the mask on a region of the mask covering the front side of the internal space.
Inventors:
KANDA HIROYUKI (JP)
IKEDA HIRONARI (JP)
KIMURA MASAAKI (JP)
NAGAI MIZUKI (JP)
IKEDA HIRONARI (JP)
KIMURA MASAAKI (JP)
NAGAI MIZUKI (JP)
Application Number:
PCT/JP2020/021060
Publication Date:
December 17, 2020
Filing Date:
May 28, 2020
Export Citation:
Assignee:
EBARA CORP (JP)
International Classes:
C25D17/00; C25D17/10; C25D21/04
Foreign References:
| JP2015151553A | 2015-08-24 | |||
| JP2002275693A | 2002-09-25 | |||
| JP2007505996A | 2007-03-15 | |||
| JP2008038208A | 2008-02-21 | |||
| US20140151218A1 | 2014-06-05 |
Attorney, Agent or Firm:
MIYAMAE, Toru et al. (JP)
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