ANOMALY DETECTION DEVICE FOR FLUID CONTROLLER, ANOMALY DETECTION SYSTEM, ANOMALY DETECTION METHOD, AND FLUID CONTROLLER

Title:

ANOMALY DETECTION DEVICE FOR FLUID CONTROLLER, ANOMALY DETECTION SYSTEM, ANOMALY DETECTION METHOD, AND FLUID CONTROLLER

Document Type and Number:

WIPO Patent Application WO/2018/150949

Kind Code:

A1

Abstract:

[Problem] To make it possible to detect leakage of a fluid in a fluid controller even when the leakage is slight. Also, to facilitate monitoring of a fluid leakage anomaly in a fluid controller or a plurality of fluid controllers in a remote location by utilizing an information communication technique. [Solution] An anomaly detection apparatus 1 for detecting an anomaly in a fluid controller 2, the anomaly detection apparatus 1 being provided with a flow channel 211 through which a fluid can flow, a closed space S isolated from the flow channel 211 by an isolation member, and a leak port LP whereby the closed space S can be communicated with the outside, has a pressure sensor 11 for sensing the pressure in the closed space S, a processing module for executing predetermined information processing, and an attachment/detachment mechanism for detachably fixing the pressure sensor 11 to the leak port LP and blocking the leak port LP from the outside in the fixed state. The processing module distinguishes an anomaly in the fluid controller 2 by comparing the sensed value sensed by the pressure sensor 11 and a predetermined threshold value, and transmits the result of distinguishing an anomaly in the fluid controller 2 to a server.

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Inventors:

HARADA AKIHIRO (JP)
NISHINO KOUJI (JP)
DOHI RYOUSUKE (JP)
KAWADA KOJI (JP)
SUGITA KATSUYUKI (JP)
IKEDA NOBUKAZU (JP)
YAMAJI MICHIO (JP)
SHINOHARA TSUTOMU (JP)
TANNO RYUTARO (JP)
KAWAUCHI YUTO (JP)

Application Number:

PCT/JP2018/004006

Publication Date:

August 23, 2018

Filing Date:

February 06, 2018

Export Citation:

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Assignee:

FUJIKIN KK (JP)

International Classes:

G01M3/26

Domestic Patent References:

WO2015045987A1

2015-04-02

Foreign References:

JPH07306721A	1995-11-21
JP2014021029A	2014-02-03
JP2015528916A	2015-10-01
JPH0291933U	1990-07-20
JPH08105813A	1996-04-23
JPH10318385A	1998-12-04
JP2007248278A	2007-09-27
JP2016023928A	2016-02-08