Title:
ANOMALY DETECTION DEVICE AND ANOMALY DETECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2019/058893
Kind Code:
A1
Abstract:
This anomaly detection device (102) detects an anomaly in a base board processing device (101). The base board processing device (101) executes predetermined processing on a base board (W). The anomaly detection device (102) is equipped with a memory unit (123) and a control unit (124). The memory unit (123) stores statistical reference ranges for variables obtained from a plurality of monitoring targets. The control unit (124) acquires the variables from the plurality of monitoring targets, and on the basis of the reference ranges, calculates statistical degrees of anomaly for the acquired variables. The control unit (124) refers to the degrees of anomaly to determine whether or not to execute the predetermined processing.
Inventors:
INOUE MASAFUMI (JP)
Application Number:
PCT/JP2018/031735
Publication Date:
March 28, 2019
Filing Date:
August 28, 2018
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/02; H01L21/027; H01L21/304; H01L21/306; G05B23/02
Foreign References:
| JP2000114130A | 2000-04-21 | |||
| JP4064402B2 | 2008-03-19 | |||
| JP2006073602A | 2006-03-16 | |||
| JP2006216920A | 2006-08-17 | |||
| JP2016045808A | 2016-04-04 | |||
| JP2007329146A | 2007-12-20 |
Attorney, Agent or Firm:
MAEI Hiroyuki (JP)
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