Title:
ANTI-REFLECTIVE COATING COMPOSITION
Document Type and Number:
WIPO Patent Application WO/2024/036679
Kind Code:
A1
Abstract:
An anti-reflective coating composition, comprising an organic polymer. The organic polymer comprises a cross-linkable polymer. The cross-linkable polymer comprises a monomer unit formed by a monomer shown in Formula (I). Compared with the prior art, a cross-linkable polymer containing hydroxyl can be fully crosslinked with a cross-linking agent containing amino and/or alkoxy substituted amino at a relatively low baking temperature, so that the baking temperature of the anti-reflective coating composition is lowered, the generation of gas during baking the composition can be effectively prevented or reduced, and unnecessary cleaning procedures can be eliminated while reducing the risk of damage to the pattern due to falling of solids formed by gas condensation. In this way, a corresponding technological process can be simplified, costs can be reduced, and the yield and productivity can be increased.
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Inventors:
ZHANG AIQIANG (CN)
CHEN RENZHI (CN)
CHEN YUAN (CN)
JIANG YIMIN (CN)
CHEN RENZHI (CN)
CHEN YUAN (CN)
JIANG YIMIN (CN)
Application Number:
PCT/CN2022/118638
Publication Date:
February 22, 2024
Filing Date:
September 14, 2022
Export Citation:
Assignee:
TAN KAH KEE INNOVATION LABORATORY (CN)
International Classes:
C07C33/38; G03F7/11; C07C69/157; C08F12/32; C08F32/08
Foreign References:
| JP2004168748A | 2004-06-17 | |||
| JP2007293294A | 2007-11-08 | |||
| US20090226843A1 | 2009-09-10 | |||
| CN101160549A | 2008-04-09 | |||
| CN101296952A | 2008-10-29 | |||
| US6090531A | 2000-07-18 | |||
| US20030224283A1 | 2003-12-04 | |||
| US20020015909A1 | 2002-02-07 |
Attorney, Agent or Firm:
UNITALEN ATTORNEYS AT LAW CO., LTD. (CN)
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