ANTI-REFLECTIVE COATINGS USING VINYL ETHER CROSSLINKERS

Title:

ANTI-REFLECTIVE COATINGS USING VINYL ETHER CROSSLINKERS

Document Type and Number:

WIPO Patent Application WO2005111719

Kind Code:

A3

Abstract:

Novel, wet developable anti-reflective coating compositions and methods of using those compositions are provided. The compositions comprise a polymer and/or oligomer having acid functional groups and dissolved in a solvent system along with a crosslinker and a photoacid generator. The preferred acid functional group is a carboxylic acid, while the preferred crosslinker is a vinyl ether crosslinker. In use, the compositions are applied to a substrate and thermally crosslinked. Upon exposure to light, the cured compositions will decrosslink, rendering them soluble in typical photoresist developing solutions (e.g., alkaline developers).

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Inventors:

GUERRERO DOUGLAS J (US)
COX ROBERT C (US)
WEIMER MARC W (US)

Application Number:

PCT/US2005/012851

Publication Date:

November 09, 2006

Filing Date:

April 15, 2005

Export Citation:

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Assignee:

BREWER SCIENCE INC (US)
GUERRERO DOUGLAS J (US)
COX ROBERT C (US)
WEIMER MARC W (US)

International Classes:

G03F7/095; C07C43/166; C08J3/24; C08J3/28; C08J5/18; G03C1/492; G03C1/494; G03F7/039; G03F7/09; G03F7/11

Foreign References:

US6110653A	2000-08-29
US5939235A	1999-08-17
US20050214674A1	2005-09-29
JPH06295064A	1994-10-21
US5972560A	1999-10-26
US6187509B1	2001-02-13
US6124077A	2000-09-26
US20030162120A1	2003-08-28
US4346163A	1982-08-24

Other References:

MOON S. ET AL.: "Three-Component Photopolymers Based on Thermal Cross-linking and Acidolytic De-Cross-Linking of Vinyl Ether Groups. Effects of Binder Polymers on Photopolymer Characteristics", CHEMISTRY OF MATERIALS, vol. 6, no. 10, October 1994 (1994-10-01), pages 1854 - 1860, XP003003534
See also references of EP 1743219A4

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