Title:
AN ANTIREFLECTIVE COATING COMPOSITION COMPRISING FUSED AROMATIC RINGS
Document Type and Number:
WIPO Patent Application WO/2010/055373
Kind Code:
A8
Abstract:
The present invention relates to an organic spin coatable anti reflective coating composition comprising a polymer where the polymer comprises (i) at least one unit with fused aromatic rings in the backbone of the polymer of structure (1), (ii) at least one unit with of structure (2), and, (iii) at least one unit with a cyclic aliphatic moiety in the backbone of the polymer of structure (3).(Formula I, II, III) (I) (II) (III) where, Fri is a substituted or unsubstituted fused aromatic ring moiety with 3 or more aromatic rings, R' and R" are independently selected from hydrogen, CrC4 alkyl, Z, CrC4alkyleneZ and where Z is substituted or unsubstituted aromatic moiety, Ri is selected from hydrogen or aromatic moiety, and B is a substituted or unsubstituted cycloaliphatic moiety. The invention further relates to a process for imaging the present composition.
Inventors:
RAHMAN M DALIL (US)
MCKENZIE DOUGLAS (US)
ANYADIEGWU CLEMENT (US)
MCKENZIE DOUGLAS (US)
ANYADIEGWU CLEMENT (US)
Application Number:
PCT/IB2009/005185
Publication Date:
July 15, 2010
Filing Date:
March 30, 2009
Export Citation:
Assignee:
AZ ELECTRONIC MATERIALS USA (US)
International Classes:
C09D165/00; C08L61/16; C09D161/16; G03F7/09; H01L21/027
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