ANTIREFLECTIVE COATINGS FOR VIA FILL AND PHOTOLITHOGRAPHY APPLICATIONS AND METHODS OF PREPARATION THEREOF

Title:

ANTIREFLECTIVE COATINGS FOR VIA FILL AND PHOTOLITHOGRAPHY APPLICATIONS AND METHODS OF PREPARATION THEREOF

Document Type and Number:

WIPO Patent Application WO2005049681

Kind Code:

A3

Abstract:

An absorbing composition is described herein that includes at least one inorganicbased compound, at least one absorbing compound, and at least one material modification agent. In addition, methods of making an absorbing composition are also described that includes: a) combining at least one inorganic-based compound, at least one absorbing compound, at least one material modification agent, an acid/water mixture, and one or more solvents to form a reaction mixture; and b) allowing the reaction mixture to form the absorbing composition at room temperature. Another method of making an absorbing composition includes: a) combining at least one inorganic-based compound, at least one absorbing compound, at least one material modification agent, an acid/water mixture, and one or more solvents to form a reaction mixture; and b) heating the reaction mixture to form the absorbing composition. Yet another method of making an absorbing composition is described that includes: a) combining at least one inorganic-based compound, at least one absorbing compound, at least one material modification agent, and one or more solvents to form a reaction mixture, wherein the at least one material modification agent comprises at least one acid and water; and b) heating the reaction mixture to form an absorbing material, a coating or a film. In other methods of making an absorbing composition described herein, those methods include: a) combining at least one inorganic-based compound, at least one absorbing compound, at least one material modification agent, and one or more solvents to form a reaction mixture, wherein the at least one material modification agent comprises at least one acid and water; and b) allowing the reaction mixture to form an absorbing material, a coating or a film.

Inventors:

LI BO (US)
KENNEDY JOSEPH (US)
IWAMOTO NANCY (US)
LU VICTOR (US)
LEUNG ROGER (US)
FRADKIN MARK A (US)
HUSSEIN MAKAREM A (US)
GOODNER MICHAEL D (US)

Application Number:

PCT/US2004/038517

Publication Date:

April 20, 2006

Filing Date:

November 17, 2004

Export Citation:

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Assignee:

HONEYWELL INT INC (US)
LI BO (US)
KENNEDY JOSEPH (US)
IWAMOTO NANCY (US)
LU VICTOR (US)
LEUNG ROGER (US)
FRADKIN MARK A (US)
HUSSEIN MAKAREM A (US)
GOODNER MICHAEL D (US)

International Classes:

G03C1/825; C08L83/04; C09D183/04; C09D183/08; G03C1/83; G03F7/09; C08G

Foreign References:

US6506497B1	2003-01-14
US20020015909A1	2002-02-07

Other References: