Title:
AOM MODULATION TECHNIQUES FOR IMPROVING LASER SYSTEM PERFORMANCE
Document Type and Number:
WIPO Patent Application WO2005121889
Kind Code:
A3
Abstract:
Digital control of frequency and/or amplitude modulation techniques of an intracavity and/or extracavity AOM (60) facilitate substantially full extinction of a laser beam (90) to prevent unwanted laser energy from impinging a workpiece (80); facilitate laser pulse amplitude stability through closed-loop control of pulse-to-pulse laser energy; facilitate beam-positioning control including, but not limited to, closed-loop control for applications such as alignment error correction, beam walk rectification, or tertiary positioning; and facilitate employment of more than one transducer on an AOM (60) to perform any of the above-listed applications.
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Inventors:
JOHNSON JAY (US)
WATT DAVID (US)
BAIRD BRIAN (US)
HARRIS RICHARD (US)
WATT DAVID (US)
BAIRD BRIAN (US)
HARRIS RICHARD (US)
Application Number:
PCT/US2005/019775
Publication Date:
October 19, 2006
Filing Date:
June 06, 2005
Export Citation:
Assignee:
ELECTRO SCIENT IND INC (US)
JOHNSON JAY (US)
WATT DAVID (US)
BAIRD BRIAN (US)
HARRIS RICHARD (US)
JOHNSON JAY (US)
WATT DAVID (US)
BAIRD BRIAN (US)
HARRIS RICHARD (US)
International Classes:
B23K26/08; B23K26/00; B23K26/02; B23K26/04; B23K26/06; G01N23/04; G02F1/11; G02F1/23; G02F1/33
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| US4352402A | 1982-10-05 |
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