Title:
APERTURE STOP, OPTICAL SYSTEM, EXPOSURE APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2010/032753
Kind Code:
A1
Abstract:
A pupil surface of an optical system or a surface adjacent to the pupil surface is provided with an aperture stop plate (12) which defines a luminous flux (11). An aperture (121) formed on the aperture stop plate (12) has a three-dimensional shape which corresponds to an optimum pupil shape of the optical system.
Inventors:
SHIRAISHI MASAYUKI (JP)
ONO TAKURO (JP)
ONO TAKURO (JP)
Application Number:
PCT/JP2009/066168
Publication Date:
March 25, 2010
Filing Date:
September 16, 2009
Export Citation:
Assignee:
NIKON CORP (JP)
SHIRAISHI MASAYUKI (JP)
ONO TAKURO (JP)
SHIRAISHI MASAYUKI (JP)
ONO TAKURO (JP)
International Classes:
G02B17/00; G02B13/14; G02B13/18; G02B13/24; G03F7/20; H01L21/027
Foreign References:
| JP2004246343A | 2004-09-02 | |||
| JP2005519332A | 2005-06-30 | |||
| JP2007027226A | 2007-02-01 | |||
| JP2002015987A | 2002-01-18 |
Attorney, Agent or Firm:
FUJIMOTO, YOSHIHIRO (JP)
Yoshihiro Fujimoto (JP)
Yoshihiro Fujimoto (JP)
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