Title:
APPARATUS FOR APPLYING LIQUID, METHOD FOR APPLYING LIQUID, AND NANO-IMPRINT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2012/002301
Kind Code:
A1
Abstract:
Disclosed is an apparatus for applying a liquid, which is provided with: a liquid jetting head, which is provided with a plurality of nozzles (120A-120C) that drop the functional liquid on a substrate, and liquid chambers (122A-122C) that are partitioned by means of a side wall (121) having at least a part thereof configured of piezoelectric elements (123-1 to 123-4), said liquid chambers communicating with the nozzles, respectively, and which drops droplets by shear-deforming the piezoelectric elements; and a transfer section, which relatively moves the substrate and the liquid jetting head. The nozzles provided in the liquid jetting head are grouped into three or more groups (a group of nozzles (120A), a group of nozzles (120B), and a group of nozzles (120C)) such that the adjacent nozzles on both the sides belong to different groups, the liquid is dropped in the same dropping timing only from the nozzles that belong to the same group, and motion of the piezoelectric elements is controlled such that the liquid is discretely landed on the substrate.
Inventors:
KODAMA, Kenichi (577 Ushijima Kaisei-machi, Ashigarakami-gu, Kanagawa 77, 〒2588577, JP)
児玉 憲一 (〒77 神奈川県足柄上郡開成町牛島５７７番地 富士フイルム株式会社内 Kanagawa, 〒2588577, JP)
OMATSU, Tadashi (12-1 Ohgi-cho 2-chome, Odawara-sh, Kanagawa 01, 〒2500001, JP)
大松 禎 (〒01 神奈川県小田原市扇町２丁目１２番１号 富士フイルム株式会社内 Kanagawa, 〒2500001, JP)
児玉 憲一 (〒77 神奈川県足柄上郡開成町牛島５７７番地 富士フイルム株式会社内 Kanagawa, 〒2588577, JP)
OMATSU, Tadashi (12-1 Ohgi-cho 2-chome, Odawara-sh, Kanagawa 01, 〒2500001, JP)
大松 禎 (〒01 神奈川県小田原市扇町２丁目１２番１号 富士フイルム株式会社内 Kanagawa, 〒2500001, JP)
Application Number:
JP2011/064626
Publication Date:
January 05, 2012
Filing Date:
June 27, 2011
Export Citation:
Assignee:
FUJIFILM Corporation (26-30, Nishiazabu 2-chome Minato-k, Tokyo 20, 〒1068620, JP)
富士フイルム株式会社 (〒20 東京都港区西麻布２丁目２６番３０号 Tokyo, 〒1068620, JP)
KODAMA, Kenichi (577 Ushijima Kaisei-machi, Ashigarakami-gu, Kanagawa 77, 〒2588577, JP)
児玉 憲一 (〒77 神奈川県足柄上郡開成町牛島５７７番地 富士フイルム株式会社内 Kanagawa, 〒2588577, JP)
OMATSU, Tadashi (12-1 Ohgi-cho 2-chome, Odawara-sh, Kanagawa 01, 〒2500001, JP)
富士フイルム株式会社 (〒20 東京都港区西麻布２丁目２６番３０号 Tokyo, 〒1068620, JP)
KODAMA, Kenichi (577 Ushijima Kaisei-machi, Ashigarakami-gu, Kanagawa 77, 〒2588577, JP)
児玉 憲一 (〒77 神奈川県足柄上郡開成町牛島５７７番地 富士フイルム株式会社内 Kanagawa, 〒2588577, JP)
OMATSU, Tadashi (12-1 Ohgi-cho 2-chome, Odawara-sh, Kanagawa 01, 〒2500001, JP)
International Classes:
H01L21/027; B05C5/00; B05C11/10; B05D1/26; B05D5/06; B05D7/00; B29C59/02
Attorney, Agent or Firm:
MATSUURA, Kenzo (Matsuura & Associates, P.O. Box 176 Shinjuku Sumitomo Bldg. 23F, 6-1, Nishi-shinjuku 2-chome, Shinjuku-k, Tokyo 23, 〒1630223, JP)
Claims: