Title:
APPARATUS FOR CONTROLLING LASER BEAM, AND APPARATUS FOR GENERATING EXTREME UV LIGHT
Document Type and Number:
WIPO Patent Application WO/2014/097811
Kind Code:
A1
Abstract:
This apparatus for controlling a laser beam may be provided with: a guide laser device; a guide laser beam wavefront adjuster disposed in the light path of the guide laser beam outputted from the guide laser device; a beam combiner configured so as to establish a mutual essential correspondence between the direction of travel of a laser beam outputted from a laser system and the direction of travel of the guide laser beam outputted from the guide laser beam wavefront adjuster; a twin-beam wavefront adjuster disposed in the light path of both the laser beam and the guide laser beam outputted from the beam combiner; a beam monitor disposed on the light path of both the laser beam and the guide laser beam outputted from the twin-beam wavefront adjuster; and a controller configured to control the guide laser beam wavefront adjuster and the twin-beam wavefront adjuster on the basis of the result of detection by the beam monitor both for the laser beam and for the guide laser beam.
Inventors:
SUZUKI TORU (JP)
WAKABAYASHI OSAMU (JP)
WAKABAYASHI OSAMU (JP)
Application Number:
PCT/JP2013/081346
Publication Date:
June 26, 2014
Filing Date:
November 21, 2013
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H05G2/00
Foreign References:
| JP2012178534A | 2012-09-13 | |||
| JP2012134447A | 2012-07-12 | |||
| JP2012212641A | 2012-11-01 |
Attorney, Agent or Firm:
UTSUNOMIYA Masaaki et al. (JP)
Masaaki Utsunomiya (JP)
Masaaki Utsunomiya (JP)
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