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Title:
APPARATUS FOR DETECTING PLASMA ANOMALOUS DISCHARGE AND METHOD OF DETECTING THE SAME
Document Type and Number:
WIPO Patent Application WO/2001/074123
Kind Code:
A1
Abstract:
Anomalous discharge during a plasma processing and its position is specified by arranging a plurality of ultrasonic-wave detecting means in the structural components of a plasma processing chamber, measuring the ultrasonic wave generated by the anomalous discharge with the ultrasonic-wave detecting means, comparing the sensor outputs of the ultrasonic-wave detecting means on the same time axis, and determining the difference in propagation time and the maximum amplitude of the ultrasonic-wave detecting means, and the display and the alarm are given. Only four ultrasonic-wave detecting means installed on the wall surface of the processing chamber are used because an iterative asymptotic calculation is performed of a relation between the difference in the propagation time and the distance from the anomalous discharge source. The lower cover of a hold case is bonded to a specified position of the processing chamber, while an AE sensor is pressed by appropriate pressure from the upper inner side.

Inventors:
YASAKA MITSUO (JP)
TAKESHITA MASAYOSHI (JP)
Application Number:
PCT/JP2001/002536
Publication Date:
October 04, 2001
Filing Date:
March 28, 2001
Export Citation:
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Assignee:
JAPAN SCIENCE & TECH CORP (JP)
KUMAMOTO TECHONOPOLICE FOUNDAT (JP)
YASAKA MITSUO (JP)
TAKESHITA MASAYOSHI (JP)
International Classes:
B01J19/08; B01J19/10; G01H1/00; G01N29/06; G01N29/14; G01N29/22; G01N29/38; G01N29/44; H01J37/32; H05H1/00; (IPC1-7): H05H1/00; H01L21/205; H01L21/302; B01J19/08; G01N29/04; G01H1/00
Foreign References:
US5810963A1998-09-22
GB2230993A1990-11-07
JPH0755874A1995-03-03
JPH06265338A1994-09-20
JPH09145346A1997-06-06
JPS52143882A1977-11-30
JPS6232364U1987-02-26
US4635198A1987-01-06
JPS62294921A1987-12-22
JPH08220076A1996-08-30
Other References:
See also references of EP 1189491A4
Attorney, Agent or Firm:
Tamura, Toshio (Sahara Mansion 17-1, Nishinippori 4-chome Arakawa-ku Tokyo, JP)
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