Title:
APPARATUS FOR DETECTING POSITION OF SHEET-LIKE MOLD, TRANSFER APPARATUS AND TRANSFER METHOD
Document Type and Number:
WIPO Patent Application WO/2011/111546
Kind Code:
A1
Abstract:
Disclosed is an apparatus (183) for detecting the position of a sheet-like mold, said apparatus transferring and aligning the sheet-like mold (M) having a fine transfer pattern (M1) formed thereon. The apparatus has a detector (191) for detecting the position of the sheet-like mold, said detector detecting the predetermined portion of the sheet-like mold (M) by detecting light transmittance of the sheet-like mold (M).
Inventors:
ITANI SHINYA (JP)
NISHIHARA HIROMI (JP)
BABA TAKETO (JP)
TASHIRO TAKAHARU (JP)
OOKAWA TAKAFUMI (JP)
KITAHARA HIDETOSHI (JP)
NISHIHARA HIROMI (JP)
BABA TAKETO (JP)
TASHIRO TAKAHARU (JP)
OOKAWA TAKAFUMI (JP)
KITAHARA HIDETOSHI (JP)
Application Number:
PCT/JP2011/054138
Publication Date:
September 15, 2011
Filing Date:
February 24, 2011
Export Citation:
Assignee:
TOSHIBA MACHINE CO LTD (JP)
ITANI SHINYA (JP)
NISHIHARA HIROMI (JP)
BABA TAKETO (JP)
TASHIRO TAKAHARU (JP)
OOKAWA TAKAFUMI (JP)
KITAHARA HIDETOSHI (JP)
ITANI SHINYA (JP)
NISHIHARA HIROMI (JP)
BABA TAKETO (JP)
TASHIRO TAKAHARU (JP)
OOKAWA TAKAFUMI (JP)
KITAHARA HIDETOSHI (JP)
International Classes:
B29C59/02; B29C33/30; B29C33/40; H01L21/027
Foreign References:
| JP2009214323A | 2009-09-24 | |||
| JP2008041852A | 2008-02-21 | |||
| JP2007165812A | 2007-06-28 | |||
| JP2004288783A | 2004-10-14 | |||
| JP2011020272A | 2011-02-03 | |||
| JP2011020272A | 2011-02-03 |
Other References:
PRECISION ENGINEERING JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, vol. 25, 2001, pages 192 - 199
See also references of EP 2546048A4
See also references of EP 2546048A4
Attorney, Agent or Firm:
MIYOSHI, Hidekazu et al. (JP)
Hidekazu Miyoshi (JP)
Hidekazu Miyoshi (JP)
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Claims: