APPARATUS FOR EXAMINING EXTERIOR OF SEMICONDUCTOR DEVICE

WIPO Patent Application WO/2019/156286

A1

The present invention relates to an apparatus for examining the exterior of a semiconductor device. A first vision examiner examines a first surface of each semiconductor device received on a tray being transported from a loading part. A second vision examiner examines a second surface of each semiconductor device received, on a tray, in a vertically inverted state through a transfer. A first picker picks up, multiple at a time, by row, from a corresponding tray, the semiconductor devices that have passed through the second vision examiner, transports the devices along the row direction to a first side examination area, and returns the devices to a corresponding tray. A third vision examiner examines a third surface and a fourth surface of each semiconductor device being transported to the first side examination area. A second picker picks up, multiple at a time, by line, from a corresponding tray, the semiconductor devices that have passed through the third vision examiner, rotates the devices by 90 degrees around the vertical axis, transports the devices along the line direction to a second side examination area, and returns the devices to a corresponding tray. A fourth vision examiner examines a fifth surface and a sixth surface of each semiconductor device being transported to the second side examination area.

KO SEUNG GYU (KR)
KWON DAE KAB (KR)
JOO BYEONG GWON (KR)
AN JU HUN (KR)

PCT/KR2018/004914

August 15, 2019

April 27, 2018

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INTEKPLUS CO LTD (KR)

H01L21/66

KR20100039965A	2010-04-19
JP2978860B2	1999-11-15
KR20170079967A	2017-07-10
KR20060127633A	2006-12-13
KR101683589B1	2016-12-08

SINJI PATENT FIRM (KR)

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