Title:
APPARATUS FOR FORMING IMAGE FOR PATTERN MATCHING
Document Type and Number:
WIPO Patent Application WO/2011/093436
Kind Code:
A1
Abstract:
Disclosed is an apparatus for forming an image for pattern matching, which forms a template on the basis of design data, without performing exposure simulation and the like, and which can form the image that corresponds to the size of an actual pattern. In order to form the image for matching, the design data is reduced or enlarged on the basis of a target pattern size, and the image for matching is formed on the basis of the reduced or enlarged pattern.
Inventors:
YANG Kyoungmo (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
梁敬模 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
梁敬模 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
Application Number:
JP2011/051721
Publication Date:
August 04, 2011
Filing Date:
January 28, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
YANG Kyoungmo (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
YANG Kyoungmo (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
International Classes:
G01B15/00; G01N23/225; G06T7/00
Attorney, Agent or Firm:
HIRAKI Yusuke (Kamiya-cho MT Bldg. 19F, 3-20 Toranomon 4-chome, Minato-k, Tokyo 01, 〒1050001, JP)
Download PDF:
Claims:
Previous Patent: MARKING METHOD, MARKING TOOL, AND PUNCH PRESS MACHINE
Next Patent: SCREEN STRETCH FRAME
Next Patent: SCREEN STRETCH FRAME