APPARATUS FOR GENERATING A PLURALITY OF BEAMLETS

WIPO Patent Application WO2004081910

A3

The invention relates to an apparatus for generating a plurality of charged particle beamlets, comprising a charged particle source for generating a diverging charged particle beam, a converging means for refracting said diverging charged particle beam and a lens array comprising a plurality of lenses, wherein said lens array is located between said charged particle source and said converging means. In this way, it is possible to reduce aberrations of the converging means.

JP2787899	[Title of Invention] A cold cathode, an electron gun and a microwave tube using the cold cathode.
JPH05211038	DEVICE FOR GENERATING ON-OFF MODULATED ELECTRON BEAM

KRUIT PIETER (NL)

PCT/NL2004/000174

March 31, 2005

March 10, 2004

Click for automatic bibliography generation  

MAPPER LITHOGRAPHY IP BV (NL)
KRUIT PIETER (NL)

H01J3/02; H01J3/07; H01J3/14; H01J3/26; H01J37/063; H01J37/317; G09G; (IPC1-7): H01J37/317; H01J37/063; H01J3/02

US4996441A	1991-02-26
US5483074A	1996-01-09
US6124599A	2000-09-26

ROELOFS B J G M ET AL: "FEASIBILITY OF MULTI-BEAM ELECTRON LITHOGRAPHY", MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, vol. 2, no. 4, December 1984 (1984-12-01), pages 259 - 279, XP002069826, ISSN: 0167-9317
ANDO M ET AL: "EXPERIMENTAL STUDY OF MULTIPLE ION BEAM MACHINE", MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, vol. 11, no. 1 / 4, 1 April 1990 (1990-04-01), pages 431 - 434, XP000134633, ISSN: 0167-9317

View/Download PDF      PDF Help

Previous Patent: TARPAULIN MOUNTING FRAME

Next Patent: APPARATUS FOR WRITING AN ELECTRONIC INK LABEL ON A RECORD CARRIER