Title:
APPARATUS FOR HEAT-TREATING SEMICONDUCTOR SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2012/011203
Kind Code:
A1
Abstract:
Provided is an apparatus for heat-treating a semiconductor substrate, which is capable of applying a horizontal magnetic flux to susceptors and is capable of suppressing treatment failures due to heat dissipation generated at the upper and lower end portions when batch processing is performed. The apparatus is characterized in having: a boat (12), which is configured by laminating, in the perpendicular direction, a plurality of susceptors (14) to be treated, each of said susceptors having a wafer (18) mounted thereon, and auxiliary susceptors (16), which are disposed to sandwich the susceptors (14) in the perpendicular direction; an induction heating coil, which is disposed on the outer circumferential side of the boat (12), and forms an alternating current magnetic flux in the direction parallel to the wafer mounting surface of the susceptors (14); and a power supply unit (36) which supplies power to the induction heating coil. The apparatus is also characterized in that the induction heating coil is composed of a main heating coil (22), which has a high ratio of heating the susceptors (14), and auxiliary heating coils (24, 26), which have high ratio of heating the auxiliary susceptors (16), and that the power supply unit (36) has a zone control means, which controls the ratios of power to be supplied to the main heating coil (22) and the auxiliary heating coils (24, 26).
Inventors:
MIYATA, Junya (LTD. Tamano Works 1-1, Tama 3-chome, Tamano-sh, Okayama 51, 〒7068651, JP)
宮田 淳也 (〒51 岡山県玉野市玉３丁目１番１号 三井造船玉野事業所内 Okayama, 〒7068651, JP)
宮田 淳也 (〒51 岡山県玉野市玉３丁目１番１号 三井造船玉野事業所内 Okayama, 〒7068651, JP)
Application Number:
JP2010/067103
Publication Date:
January 26, 2012
Filing Date:
September 30, 2010
Export Citation:
Assignee:
MITSUI ENGINEERING & SHIPBUILDING CO., LTD. (6-4 Tsukiji 5-chome, Chuo-ku Tokyo, 39, 〒1048439, JP)
三井造船株式会社 (〒39 東京都中央区築地５丁目６番４号 Tokyo, 〒1048439, JP)
MIYATA, Junya (LTD. Tamano Works 1-1, Tama 3-chome, Tamano-sh, Okayama 51, 〒7068651, JP)
三井造船株式会社 (〒39 東京都中央区築地５丁目６番４号 Tokyo, 〒1048439, JP)
MIYATA, Junya (LTD. Tamano Works 1-1, Tama 3-chome, Tamano-sh, Okayama 51, 〒7068651, JP)
International Classes:
H01L21/324
Attorney, Agent or Firm:
MURAKAMI, Tomokazu (9th foor, COI Minami-Ikebukuro Bldg. 27-17, Minami-Ikebukuro 2-chome, Toshima-k, Tokyo 22, 〒1710022, JP)
Claims: