Title:
APPARATUS FOR LIQUID TREATMENT OF TREATMENT OBJECT
Document Type and Number:
WIPO Patent Application WO/2008/068880
Kind Code:
A1
Abstract:
A treatment apparatus for liquid treatment of a treatment object by bringing
a liquid into contact with the treatment object. It is intended to solve the problems
of when the treatment apparatus conducts a liquid treatment over a given region
on the treatment object, adhering of misty liquid to the treatment object and
consumption of a large volume of liquid in the liquid treatment. The treatment
apparatus comprises supply means (60,61,62,R60,R61,R62) for liquid supply;
treatment object treating means (3,R3) for not only bringing the liquid supplied
by the supply means (60,61,62,R60,R61,R62) into contact with treatment object
(W,W') but also, while preventing the diffusion of the liquid, treating
the treatment object (W,W'); recovery means (70,71,72,R70,R71,R72)
for recovering the liquid supplied to the treatment object treating means (3,R3);
and holding means (4,R4) for holding the treatment object treating means (3,R3)
apart from contact with the treatment object (W,W').
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Inventors:
MIYANARI ATSUSHI (JP)
Application Number:
PCT/JP2007/000965
Publication Date:
June 12, 2008
Filing Date:
September 06, 2007
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO LTD (JP)
MIYANARI ATSUSHI (JP)
MIYANARI ATSUSHI (JP)
International Classes:
H01L21/304; B08B3/02; H01L21/027
Foreign References:
| JPH11233481A | 1999-08-27 | |||
| JP2006088033A | 2006-04-06 | |||
| JP2005515613A | 2005-05-26 | |||
| JP2005079219A | 2005-03-24 |
Attorney, Agent or Firm:
OSUGA, Yoshiyuki (Nibancho Bldg.8-20, Nibancho, Chiyoda-ku, Tokyo 84, JP)
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