Title:
APPARATUS FOR MANUFACTURING TEMPLATE FOR IMPRINT APPLICATIONS AND TEMPLATE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2017/010539
Kind Code:
A1
Abstract:
An apparatus for manufacturing a template for imprint applications according to the embodiment is provided with: a stage 13 for supporting a template W on which a pattern of recesses and protrusions is formed, the template W having a protrusion 52; a supply head 11 for supplying a liquid repellent in liquid form to the template W on the stage 13; movement mechanisms 15, 17A, and 17B for relatively moving the supply head 11 and the stage 13 in the direction that tracks the stage 13; and a control unit 40 for controlling the supply head 11 and the movement mechanisms so that the supply head 11 coats the liquid repellent in liquid form on at least the side surface of the protrusion 52 avoiding the pattern of recesses and protrusions. The liquid repellent in liquid form includes a liquid-repellent component and a non-liquid-repellent component that react with the surface of the template W, a volatile solvent for dissolving the liquid-repellent component, and a fluorine-based volatile solvent for dissolving the non-liquid-repellent component
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Inventors:
DEMURA KENSUKE (JP)
NAKAMURA SATOSHI (JP)
MATSUSHIMA DAISUKE (JP)
HATANO MASAYUKI (JP)
KASHIWAGI HIROYUKI (JP)
NAKAMURA SATOSHI (JP)
MATSUSHIMA DAISUKE (JP)
HATANO MASAYUKI (JP)
KASHIWAGI HIROYUKI (JP)
Application Number:
PCT/JP2016/070799
Publication Date:
January 19, 2017
Filing Date:
July 14, 2016
Export Citation:
Assignee:
SHIBAURA MECHATRONICS CORP (JP)
International Classes:
H01L21/027; B29C33/38; B29C59/02
Foreign References:
| JP2010251601A | 2010-11-04 | |||
| JP2012099729A | 2012-05-24 | |||
| JP2011053266A | 2011-03-17 | |||
| JP2007245702A | 2007-09-27 |
Attorney, Agent or Firm:
MISAWA PATENT OFFICE, P.C. (JP)
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