APPARATUS AND METHOD FOR ANALYZING MINUTE SAMPLE

WIPO Patent Application WO/2012/008089

A1

Disclosed is a mass spectrometry, whereby an organic minute foreign material that causes a failure of a device and the like can be analyzed at high sensitivity in an SEM, said organic minute foreign material being approximately several μm. In an SEM chamber, a heating mechanism for heating the minute sample, and a mass spectrometer for analyzing a vaporized sample are attached. Consequently, without taking out the foreign material observed in the SEM from the vacuum chamber of the SEM, the minute organic foreign material can be analyzed by mass spectrometry. Furthermore, both the inorganic and organic foreign materials can be identified using EDX at the same time, and foreign materials can be analyzed with high throughput.

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HORIKOSHI, Kazuhiko (HITACHI LTD., 292 Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
堀越　和彦 (〒17 神奈川県横浜市戸塚区吉田町２９２番地　株式会社日立製作所　横浜研究所内 Kanagawa, 〒2440817, JP)
AKAMATSU, Naotoshi (HITACHI LTD., 292 Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)

JP2011/003327

January 19, 2012

June 13, 2011

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HITACHI, LTD. (6-6 Marunouchi 1-chome, Chiyoda-ku Tokyo, 80, 〒1008280, JP)
株式会社日立製作所 (〒80 東京都千代田区丸の内一丁目６番６号 Tokyo, 〒1008280, JP)
HORIKOSHI, Kazuhiko (HITACHI LTD., 292 Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
堀越　和彦 (〒17 神奈川県横浜市戸塚区吉田町２９２番地　株式会社日立製作所　横浜研究所内 Kanagawa, 〒2440817, JP)

G01N27/62; G01N23/225; H01J37/20; H01J37/252

INOUE, Manabu et al. (6-1, Marunouchi 1-chome, Chiyoda-k, Tokyo 20, 〒1008220, JP)

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