APPARATUS AND METHOD FOR ANALYZING MINUTE SAMPLE

WIPO Patent Application WO/2012/008089

A1

Disclosed is a mass spectrometry, whereby an organic minute foreign material that causes a failure of a device and the like can be analyzed at high sensitivity in an SEM, said organic minute foreign material being approximately several μm. In an SEM chamber, a heating mechanism for heating the minute sample, and a mass spectrometer for analyzing a vaporized sample are attached. Consequently, without taking out the foreign material observed in the SEM from the vacuum chamber of the SEM, the minute organic foreign material can be analyzed by mass spectrometry. Furthermore, both the inorganic and organic foreign materials can be identified using EDX at the same time, and foreign materials can be analyzed with high throughput.

JP4783533	FAIMS equipment using a carrier gas with a mixed composition and its method
JP2003098149	SAMPLE PREPARATOR FOR MASS SPECTROMETRY
JP4644263	A method for mass spectrometry by desorbing / ionizing a solid support and a plurality of substances or complexes on the solid support.

HORIKOSHI KAZUHIKO (JP)
AKAMATSU NAOTOSHI (JP)
IWANAMI TAKASHI (JP)

PCT/JP2011/003327

January 19, 2012

June 13, 2011

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HITACHI LTD (JP)
HORIKOSHI KAZUHIKO (JP)
AKAMATSU NAOTOSHI (JP)
IWANAMI TAKASHI (JP)

G01N27/62; G01N23/225; H01J37/20; H01J37/252

WO1997019343A1

1997-05-29

JP2001154112A	2001-06-08
JPH10213479A	1998-08-11
JP2008003016A	2008-01-10
JP2008304340A	2008-12-18
JPH09320512A	1997-12-12
JP2009063327A	2009-03-26
JPH0996614A	1997-04-08

INOUE, Manabu et al. (JP)
Manabu Inoue (JP)

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