Title:
APPARATUS AND METHOD FOR ANALYZING POLARIZATION BY ADJUSTING INCIDENT ANGLE OR NUMERICAL APERTURE USING APERTURES
Document Type and Number:
WIPO Patent Application WO/2023/204359
Kind Code:
A1
Abstract:
The present invention relates to an apparatus and method for analyzing polarization by adjusting incident angle or numerical aperture using apertures. To this end, the apparatus for analyzing polarization by adjusting incident angle or numerical aperture using apertures according to an embodiment of the present invention may comprise: a first aperture through which an illumination beam reflected from a sample on a substrate passes; a second aperture through which the illumination beam passes after passing through the first aperture; and a detector that detects the illumination beam passing through the second aperture and selects the incident angle of the illumination beam and the numerical apertures of the first and second apertures.
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Inventors:
LEE JAE JUN (KR)
PARK MI TA (US)
PARK MI TA (US)
Application Number:
PCT/KR2022/012755
Publication Date:
October 26, 2023
Filing Date:
August 25, 2022
Export Citation:
Assignee:
AUROS TECH INC (KR)
International Classes:
G01N21/21; G01B11/06; G02B27/00; H01L21/66
Foreign References:
| JP2905448B2 | 1999-06-14 | |||
| JP2020500289A | 2020-01-09 | |||
| JP2008139613A | 2008-06-19 | |||
| KR20080114331A | 2008-12-31 | |||
| KR20150011313A | 2015-01-30 |
Attorney, Agent or Firm:
DAE-A INTELLECTUAL PROPERTY CONSULTING (KR)
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