Title:
APPARATUS AND METHOD FOR CLEANING THIN FILM SOLAR CELL PANEL BY JETTING HIGH-PRESSURE LIQUID
Document Type and Number:
WIPO Patent Application WO/2010/116691
Kind Code:
A1
Abstract:
An apparatus which performs cleaning by jetting a high-pressure liquid can reliably removes particles adhered inside of a plurality of scribe lines provided at constant intervals on a thin film solar cell panel without a possibility of scratching the film-forming surface on the surface and removing a thin film. Jetting nozzles are disposed at constant intervals in the longitudinal direction of a nozzle holder, corresponding to the positions of the scribe lines on the thin film solar cell panel, the nozzle holder is held by means of supporting sections on the both sides of the nozzle holder such that the nozzle holder can freely move in the longitudinal direction of the nozzle holder, and while relatively transferring the solar cell panel in parallel to the scribe lines, the panel is cleaned by jetting a high-pressure liquid in the shape of one straight line from each jetting nozzle of the nozzle holder in parallel to the scribe lines of the solar cell panel.
Inventors:
IKE, Hideaki (())
池秀朗 (())
TSUJITA, Keiji (())
辻田京史 (())
TANAKA, Hideyuki (())
田中秀幸 (())
池秀朗 (())
TSUJITA, Keiji (())
辻田京史 (())
TANAKA, Hideyuki (())
田中秀幸 (())
Application Number:
JP2010/002385
Publication Date:
October 14, 2010
Filing Date:
March 31, 2010
Export Citation:
Assignee:
KAWASAKI PLANT SYSTEMS KABUSHIKI KAISHA (1-1 Higashikawasaki-cho 3-chome, Chuo-ku Kobe-sh, Hyogo 70, 〒6508670, JP)
カワサキプラントシステムズ株式会社 (〒70 兵庫県神戸市中央区東川崎町３丁目１番１号 Hyogo, 〒6508670, JP)
IKE, Hideaki (())
池秀朗 (())
TSUJITA, Keiji (())
辻田京史 (())
TANAKA, Hideyuki (())
カワサキプラントシステムズ株式会社 (〒70 兵庫県神戸市中央区東川崎町３丁目１番１号 Hyogo, 〒6508670, JP)
IKE, Hideaki (())
池秀朗 (())
TSUJITA, Keiji (())
辻田京史 (())
TANAKA, Hideyuki (())
International Classes:
B08B3/02; H01L21/304; H01L31/042
Attorney, Agent or Firm:
PATENT CORPORATE BODY ARCO PATENT OFFICE (3rd Fl, Bo-eki Bldg.123-1, Higashimachi, Chuo-k, Kobe-shi Hyogo 31, 〒6500031, JP)