Title:
APPARATUS AND METHOD FOR COMPOSITION AND QUANTITATIVE ANALYSIS USING TIME OF FLIGHT, AND FARADAY CUP ASSEMBLY USED THEREFOR
Document Type and Number:
WIPO Patent Application WO/2015/016632
Kind Code:
A1
Abstract:
The present invention relates to a composition and quantitative analysis technique and, more particularly, to an apparatus and a method capable of analyzing the composition and quantity included in a wafer or a specimen using a time of flight during ion scattering. Furthermore, the present invention relates to a Faraday cup assembly for ion and electron beam current measurement which can be used for the above apparatus.
Inventors:
LEE JOONG-WHAN (KR)
YU KYU-SANG (KR)
PARK KYUNG-SOO (KR)
AN SUNG-YUP (KR)
KIM WAN-SUP (KR)
MIN WON-JA (KR)
JUNG KWANG-HWAN (KR)
YU KYU-SANG (KR)
PARK KYUNG-SOO (KR)
AN SUNG-YUP (KR)
KIM WAN-SUP (KR)
MIN WON-JA (KR)
JUNG KWANG-HWAN (KR)
Application Number:
PCT/KR2014/007043
Publication Date:
February 05, 2015
Filing Date:
July 31, 2014
Export Citation:
Assignee:
K MAC (KR)
International Classes:
H01J49/06; G01N23/225; G01R19/00
Foreign References:
| JP2006322776A | 2006-11-30 | |||
| JPH075129A | 1995-01-10 | |||
| KR20130033877A | 2013-04-04 | |||
| JP2002520799A | 2002-07-09 | |||
| US20110192972A1 | 2011-08-11 |
Attorney, Agent or Firm:
DAE-A INTELLECTUAL PROPERTY CONSULTING (KR)
특허법인 대아 (KR)
특허법인 대아 (KR)
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