Title:
APPARATUS AND METHOD FOR THE CONDENSED PHASE PRODUCTION OF TRISILYLAMINE
Document Type and Number:
WIPO Patent Application WO/2013/052673
Kind Code:
A3
Abstract:
The present invention is directed to a condensed phase batch process for synthesis of trisilylamine (TSA). An improved synthesis method that incorporates a solvent to help promote a condensed-phase reaction between ammonia gas (or liquid) and liquified monochlorosilane (MCS) in good yields is described. This method facilitates the removal of the byproduct waste with little to no reactor down time, substantial reduction of down-stream solids contamination and high-purity product from first-pass distillation.
Inventors:
RITTER COLE J (US)
Application Number:
PCT/US2012/058764
Publication Date:
July 11, 2013
Filing Date:
October 04, 2012
Export Citation:
Assignee:
VOLTAIX INC (US)
International Classes:
B01J8/00; C01B21/068; B01J19/18
Foreign References:
US20110136347A1 | 2011-06-09 | |||
US20100310443A1 | 2010-12-09 |
Other References:
WELL, R. L. ET AL.: "Studies of Silicon-Nitrogen Compounds. The Base- Catalyzed Elimination of Silane from Trisilylamine", J. AM. CHEM. SOC., vol. 88, 1966, pages 37 - 42, XP055080155
FESSENDEN, R. ET AL.: "The Chemistry of Silicon-Nitrogen Compounds", CHEM. REV., vol. 66, 1961, pages 361 - 388, XP055080157
FESSENDEN, R. ET AL.: "The Chemistry of Silicon-Nitrogen Compounds", CHEM. REV., vol. 66, 1961, pages 361 - 388, XP055080157
Attorney, Agent or Firm:
GAGLIA, Jr. Charles, A. et al. (One Gateway CenterNewark, NJ, US)
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